Photon Emission Microscopy

• Ultra High Sensitivity - for the localization of very weak emissions
• Visible and NIR range detection
• Multi-detector capability - SiCCD, INGaAs, HgCdTe
• Visible and NIR spectroscopy for defect fingerprinting
• Analytical and tester docked configurations
• Ultra high precision stage (0.1micron resolution, <0.5micron repeatability)
• Upgradable to full laser scanning capabilities

Laser Scanning Fault Localization Microscopy

Versatile multi-technique platform

Laser induced techniques
TIVA, LIVA, SEI, OBIRCH, TBIP, OBIC, SCOBIC, RIL and SDL

Photon Emission
With SiCCD, INGaAs, HgCdTe detectors

• High power delivery (with 500mW lasers)
• Submicron Image Resolution for ULSI applications
• Ultra High Resolution stage (0.1micron resolution, <0.5micron repeatability)
• Analytical and tester docked configurations

SPEMS 1100

The SPEMS 1100 series systems have been designed for high automation of hardware and software and also the ability to switch over to manual control when required.

Computer Controlled XYZ Stage
Stage movement is fully controlled from the computer console via the X, Y and Z buttons on the software or by joystick control. A rapid image shift is enabled by double-clicking on the image displayed live on the window.

Motorized Optics
Detectors and optics are automatically moved into and out of position from the optical path depending on the imaging mode (Live or Capture) chosen.

NIR Filter: Key to Backside Imaging
On selecting Backside Imaging, the NIR filter automatically positions into the optical path.

User-friendly Software
SPEMS Windows-based system software includes real-time frontside and backside imaging, image acquisition and overlay, image processing and annotation, image data attachment, thumbnail browsing, pseudo-coloring and other functions that simplify the system operations.

Live Navigation Window
The SPEMS 1100 series enables live stage navigation on the window with its dual camera system. The DUT can be continuously monitored and inspected without opening the light-tight enclosure.

Local Coordinates Registration
A standard feature in the software, the coordinate registration system enables users to interface with almost any third party CAD software (eg, Knights).

SOM 1105 Scanning Optical Microscope System

An integrated multi-laser NIR scanning optical microscope optimized for high resolution, high sensitivity, versatility and high power delivery. The system uses a 1064nm and a 1340nm laser.

• High resolution backside imaging with sub micron precision stage
• Multi-technique platform for laser induced and photon emission application
• Designed for TIVA, LIVA, OBIRCH, TBIP, DReM, SCOBIC and SDL techniques

SOM 1005 Scanning Optical Microscope System

SOM 1005 is an integrated compucentric system designed for maximum ease of use and flexibility. The system is optimized for maximum sensitivity and resolution of laser induced phenomena with high power delivery. Currently, the system is designed for OBIC, SCOBIC, LIVA, TIVA, SEI, and OBIRCH and is upgradeable for future techniques. SOM 1005 can be customized to meet special requirements and applications. The system uses a 1064nm and a 1340nm laser. The 1064nm laser is capable of electron-hole pair generation through backside silicon while the 1340nm laser is a high resolution thermal probe which allows localized heating. The laser multiplexer provides seamless selection, attenuation and blanking of the two lasers.

SOM 1005 incorporates a navigation camera for real-time backside imaging complementing the slow scan rate of the laser scan module. The microscope module is custom designed to provide maximum flexibility for the optical components required for various techniques. Included in the microscope module is a motorized detector selector, two 3-position optical component turrets and a 5-position objective turret. The system comes with an auxiliary signal port, which has a proprietary hardware averager capable of 1 million sample averaging.