Centar-TEM Preparation System

Sagitta's automated Centar-TEM Preparation System revolutionizes the time-consuming and imprecise polishing and verification process for the preparation of TEM samples.

Automation
By automating a previously manual process, the system is able to simplify and shorten the sample preparation procedure and provide highly accurate samples with optimal surface quality.

Improved Sample Thinness
The system provides samples that are extremely thin. Samples range from one to four microns, depending on the target characteristics.

Higher Success Rate
Manual polishing is tedious and lacks precision. During the polishing process, Sagitta's fully automated solution monitors the polishing rate and ensures reliable TEM sample preparation.

Increased Productivity
The Centar-TEM replaces a manual procedure that takes many hours with an automatic system that shortens TEM sample preparation to less than an hour.

Centar-SEM Cross-Sectioning System

Sagitta's Centar-SEM Cross-Sectioning System enables failure analysts to cross-section samples of devices with deep sub-micron features at a pre-defined point with minimal time and pinpoint precision. The system features a fully automated polishing capability to expose specific, predetermined, or unique targets with 0.1µm accuracy.

Centar-SEM is designed to meet the challenges of semiconductor sample cross-sectioning needs with a new and fully automated solution. The system offers easy target positioning and definition, self-controlled polishing, and superior process control and monitoring. Centar-SEM is an ideal tool for the demands of the most advanced yield labs in the semiconductor industry.

Benefits include:

> Reduced sample preparation time
> No risk of missing the examination point
> Increased uniformity among samples

Centar-SEM delivers increased lab success rates and capacity, reduced analysis cycle times and faster feedback..

Centar-SEM incorporates proprietary technical expertise from a number of disciplines, including:

> Electro-optic engineering solutions, including custom solutions for the following front-ends and data formats:

- Sensors, including CCD camera
- Opto-electronics devices, including IR detectors
- High speed analog/digital and video format converters

> Advanced signal and image-processing systems, including implementation of real-time control software and fast image processing algorithms

> Accurate, high-performance motion control systems such as servo and open-loop control, and the incorporation of advanced position-sensing devices