> 3-Axis Robots

> Particle Detection Systems

>EFEM & Sorters

> 200mm Wafer Sorter

Nextech Titan™ 3-Axis Robot

The Nextech Titan™ 3-Axis robot is a 100% drop-in replacement for all Equipe™-Type R-Theta-Z robot models. The Titan™ offers superior design, components, performance and reliability as well as complete 3rd party software emulation.

The innovative all-in-one design has a MTBF rating of 40,000 hours and enables fast, easy integration into existing tools and new system designs.

Design features

The Titan™ uses less than a third of the total parts of Equipe-type robots. The need for fewer components offers improved reliability and serviceability as well as a requirement for fewer spares.

Titan's 100% drop-in replacement capability is as follows:

• Physical dimensions maintained
• Flange (Mounting) bolt patterns matched
• Top & bottom mounting capability
• Supports RS-232, RS-485 Teach Pendant & Ethernet Interfaces

The Titan's design integrates the following units all within the Titan™ robot cylinder (canister) housing:

• Robot Motion Controller
• Power Supply
• Servo Amplifiers

The Titan™ robot design also eliminates the requirement for external interconnection cabling.

Superior components

• ZERO Backlash Harmonic Drive™ gear reducers
• Low inertia, high response brushless motors
• 32-bit, real-time motion control kernel
• High-strength, extruded structural members provide superior rigidity for effortless top or bottom mounting.

Benefits

• Reduced cost of integration
• Excellent ROI cost-effective alternative to replacing existing, older-generation robots
• Eliminates the need to re-engineer existing products
• Complete 3rd party software emulation
  

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Aludra 1020 Particle Detection System

The Aludra 1020 Particle Detection System is a superior performance, small footprint mask metrology system capable of scan speeds of 35 seconds.

The Aludra 1020 is able to map 2 to 20µm particles on both glass and pellicle. The system's footprint is only 384 x 357 x 397mm.

Offering the fastest available reticle scanning technology with 100% qualification of reticles prior to stepper usage, the Aludra 1020 generates particle maps for targeted examination/cleaning.

The advanced mask metrology system is highly versatile and features programmable pellicle heights and edge exclusion zones. The system can also scan all types of 6in reticles (ASML, Nikon, Canon, Ultratech) and is available in standalone, automated and OEM configurations.

The system's Altair calibration reticle validates repeatability and enables rapid tool qualifications. Large particles remain stationary over time. For durability there is a quartz 'pellicle' option for longer life.

Standards are available for a variety of particle sizes. Available in both wafer fab (photomask) and mask shop (photoblank) configurations. Integrated solutions are also available for the following:

• Orion™ Reticle Inspection System with stepper or SMIF container interface
• Altair™ calibration reticles for validating repeatability
• Optional desktop software for standalone use
  

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Taurus 300 EFEM & Sorter

Available as either a Equipment Front End Modules (EFEM) or Wafer Sorter, the Taurus 300 has two, three, and four Load Port configurations.

Throughput with ID for the Taurus 300 is:

400 wafer per hour (Sorter)
200 wafer per hour (EFEM)

The low cost Taurus 300 has been designed with simplicity in mind and utilizes modern robot, pre-aligner, & OCR technologies. The MTBF rate is 4,000 hours.

The system's software has been designed to comply with the 300mm Standards Robust Framework used for multiple tool types (Metrology & Automation for multiple substrates).

Design features
Equipped with Vega™ Chip Detection Option, the system is able to detect 80µm chips on edges caused by process tools. The chip detection option can also be integrated into the alignment process to maximize throughput. Vega™ can achieve the following:

• Find 80µm chips during the alignment process
• Detect Chips Before Breakage
• Isolate Process Tool Handling Issues
• Selectively Run as a Recipe on Sorter
• Sensitivity: 10 µm

A Cognex In-Sight 1701wafer ID system offers robust performance, even on difficult scribes, for less manual intervention. An easy-to-ease interface and automatic tuning capability greatly reduces time spent adjustingconfigurations improved mounting for easier setup.

The Sirius 300 Pre-Aligner enables the system to achieve cycle times of less than 3s. The system's repeatability is:

Linear: ± 0.025 mm
Angular: ± 0.04°

The Taurus 300 system also comes equipped with NexTech's Titan™ 407 robot featuring an integrated motion controller, server amplifiers and a power supply within a cylindrical housing. The repeatability performance is:

T: ± 0.006°
R & Z: ± 0.025 mm

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Pegasus Wafer Sorter

Available in two, three, and four I/O configurations, the Pegasus Wafer Sorter can process 500 wafers per hour with OCR read. The sorter's MTBF is 4,000 hours and it achieves a 99.99% readability rate on bare silicon .

The Pegasus system uses a proven design and modern components and maintains the reliability of the PST WMS Platform. The sorter utilizes modern robot, pre-aligner, & OCR Third Generation design.

The system's software has been designed to comply with the 300mm Standards Robust Framework used for multiple tool types (Metrology & Automation for multiple substrates).

Design features
Equipped with Vega™ Chip Detection Option, the system is able to detect 80µm chips on edges caused by process tools. The chip detection option can also be integrated into the alignment process to maximize throughput. Vega™ can achieve the following:

• Find 80µm chips during the alignment process
• Detect Chips Before Breakage
• Isolate Process Tool Handling Issues
• Selectively Run as a Recipe on Sorter
• Sensitivity: 10 µm

A Cognex In-Sight 1701wafer ID system offers robust performance, even on difficult scribes, for less manual intervention. An easy-to-ease interface and automatic tuning capability greatly reduces time spent adjustingconfigurations improved mounting for easier setup.

The Sirius Pre-Aligner sub-system enables the system to achieve cycle times of less than 3s. The system's repeatability is:

Linear: ± 0.025 mm
Angular: ± 0.04°

The Pegasus system also comes equipped with NexTech's Titan™ robot featuring an integrated motion controller, server amplifiers and a power supply within a cylindrical housing. The repeatability performance is:

T: ± 0.006°
R & Z: ± 0.025 mm