Metryx
Monitor
The
Metryx Monitor is a bench-top version of the popular
Metryx Mentor metrology tool. Based on an unique
measurement capability and innovative design,
the Monitor brings atomic level weight measurement
accuracy to the R&D environment and small scale
production.
Weight
metrology innovation used in the Monitor mean
that non-contact thin film measurements can be
realized along with determining wet and dry etch
removal. Weight metrology also allows non destructive
atomic scale measurement accuracy on production
or test wafers and true Statistical Process Control.
Key features:
