Mentor
is a new generation of metrology tool based on innovative
weighing technology.
Mass
and density are fundamental properties of almost
all deposited materials used in the semiconductor
industry.
The
Mentor utilizes advanced compensation algorithms
that improve weighing accuracy by an order of magnitude
compared with previous techniques. Almost
any process that results in a change in weight of
the substrate can benefit from the tool.
All measurements are non-contact and non-destructive.
Product wafers can be measured directly or test
wafers can be shared with other metrology tools.
Fast,
accurate and simple to use
Analysis
times are fast. Throughputs of 75 wph ensure in-line
compatibility. The
Mentor offers fully automatic cassette-cassette
operation using industry standard 200 and 300mm
open cassettes to allow measurements of the wafers
before and after processing.
Sophisticated control of ambient conditions is fully
automatic and provides weighing capability to the
required level of <0.04mg needed to detect density
changes in the range of 0.01g/cm3.
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The
system is controlled via an SGVA Touchscreen
with simple to use software that can be
fully integrated to the fab communications
network e.g. SECS11/GEM.
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Ideal
for non-contact, non-destructive measurements
on production wafers
For low k determinations, alternative approaches
are generally slow and require either test wafers
or risk contamination (eg Hg dots)
Metal film analyses pose similar problems because
they use resistivity measurements involving 4
point probes cause wafer damage.
Metryx
Mentor measures production wafers as standard.
The tool is sensitive enough to distinguish
k variations from small changes in deposition
parameters. It can also determine the anneal
state in Copper films not detectable by other
methods. |
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Applications
Low
k dielectrics
Accurate determination of k variations.
Metal films
Thickness measurements to atomic resolution for
barrier layers.
Other
application areas include:
- CMP
-
Step coverage
- Out-gassing of moisture/solvents
-
Factory-wide SPC
