IR-820
Innovative
Robotics is an expert in supplying wafer handling
robot systems to the semiconductor industry.
The
new IR820 robot and controller is designed for automated
processes that require exceptional accuracy, reliability,
and ultra-cleanliness.
The product is ideally suited for silicon wafer handling
in semiconductor fabrication plants as well as certain
processes such as small flat panel applications and
hard disk production.
The IR820 robot is the second generation of the IR800
line, which features four independent and coordinated
axes, with a fifth axis optional. The IR820 is available
with various arm lengths. The four or more degrees
of freedom and configurable reach allow it to manage
a wide variety of tasks, including multiple in-line
cassettes applications for 300 mm wafers.
The IR820 features a new state-of-the-art servo amplifier
and controller. Each of the robot's three principle
rotary joints has a 640-degree range of motion, allowing
for flexibility of robot placement and very efficient
trajectories. The robot has tested to the highest
cleanliness standards. Software features include sophisticated
trajectory planning and "streaming motion" that automatically
blends programmed motions, yielding safe, smooth and
fast throughput. Blended motion commands can seamlessly
integrate motion with application-specific I/O.
Specifications
- Repeatability:
±0.05mm.
-
Payload: 2.2kg at wrist
- ISO
Class 1 capable
Typical
Applications
- Semiconductor
wafer handling
- Small
substrate glass handling (flat panel display, reticle
etc)
- Rigid
or hard disk manufacturing
