ALLIANCE
SALES (EUROPE) TO SUPPORT
NEXTECH'S
METROLOGY, AUTOMATION AND SUBSYSTEMS
Alliance
Sales (Europe) has been appointed by NexTech Solutions
Inc to be responsible for sales and technical
support of NexTech's wide range of high performance
Metrology, Automation, and Subsystem Components
for the semiconductor industry throughout the
UK, Scandinavia and Finland.
Among
the NexTech products that will now be supported
by Alliance Sales (Europe) is the Aludra 1020
Particle Detection System which is a superior
performance, small footprint mask metrology system
capable of scan speeds of 35 seconds.
The
Aludra 1020 is able to map 2 to 20µm particles
on both glass and pellicle. The system's footprint
is only 384
x 357 x 397mm.
Offering the fastest available reticle scanning
technology
with 100% qualification of reticles prior to stepper
usage, the Aludra 1020 generates particle maps
for targeted examination/cleaning.
The
advanced mask metrology system is highly versatile
and features programmable pellicle heights and
edge exclusion zones. The system can also scan
all types of 6in reticles (ASML, Nikon, Canon,
Ultratech) and is available in standalone, automated
and OEM configurations.
The
system's Altair calibration reticle validates
repeatability and enables rapid tool qualifications.
Large particles remain stationary over time. For
durability there is a quartz
'pellicle' option for longer life.
Standards
are available for a variety of particle sizes.
Available in both wafer fab (photomask) and mask
shop (photoblank) configurations. Integrated
solutions are also available for the following:
- Orion™ Reticle Inspection System with stepper
or SMIF container interface
- Altair™ calibration reticles for validating
repeatability
- Optional desktop software for standalone use
